这种是Microelectromechanical systems (MEMS)的应用。MEMS常常用硅作为加工材料。常见的MEMS的应用就有加速传感器,包括在汽车气囊上的应该,手机,相机还有Wii。
Accelerometers in consumer electronics devices such as game controllers (Nintendo Wii), personal media players / cell phones (Apple iPhone )[9] and a number of Digital Cameras (various Canon Digital IXUS models). Also used in PCs to park the hard disk head when free-fall is detected, to prevent damage and data loss.